X-Ray tomography can be used for layer thickness analysis. It is a non destructive technique and can be used on bulk of powder. For composition analysis SEM with EDX can be used.
- most efficient method for layer thickness measurements is SEM (Scanning Electron Microscopy); others can be also used, depending on your sample type or the required accuracy needed.
- for the layer composition analysis I recommend you 2 analysis methods which are basically complementary in the results provided: 1) XRF (X-ray Fluorescence Spectrometry) for the layer's chemical elemental composition and 2) XRD (X-ray Diffraction) for the layer phase analysis.
Let me know if you're interested in further discussions. Best regards!
I would propose to use small angle scattering SAXS or SANS (x-ray or neutron). They are non invasive (at least SANS) and give averaged information. The layer size is just in the range of SAS. The two measurement can give very detailed information about the layers.