Hi .. you can use chemical etching with buffered-HF (BHF) which can only etch YSZ .

Regards

I understand you want to measure the coating layer? I'm right ?

#A sample of cross section of the layer +substrate and you can measured it by microscope.

#by pulling up test using epoxy FM1000 and after puling up just dissolve the epoxy.

this only for coating layer up ~100 micron

Hi Michele,

I have the same query with you about etching the YSZ. I tried with BHF but the etching rate was really slow.

Did you find any other possible etchant?

Regards,

go for reactive ion etching....the wet etching process using BHF is very slow for the YSZ film. Moreover, if you use BHF the line definition after the etch patterning is not very sharp.