Micro electro-mechanical system consist both mechanical and electronics part. so how can we combine both. what part is of electronics and how can be combine with mechanical?
The electrical part of MEMS is commonly used to measure/read-out the movements of the mechanical parts, but it can also be used to actuate the mechanical structure. The simplest MEMS is microcantilever. You can search on google 'microcantilever' and you will find full details.