You have to determine the purpose of the nano particle layer of silica on silicon or glass. You can use glue material to stick the silica grains. You can mix it with epoxied and coat the substrate with it and leaving it dry.
However if you want hard layer you can make a paste of your material and then you coat your substrate with the paste and then you can heat it in a furnace under air. This technique is used in thick film technology .
@Abdelhalim Zekry , @Pierluigi Traverso, thank you for your reply. My objective is to deposit metal thin film on a monolayer of silica nanoparticles of diameter 200 nm. So far I have been cleaning the surface of substrates with chromic acid and then depositing the nanoparticles by spin coating. But the adhesion is very poor. The particles easily come off. I dont want to mix the particles with epoxies. Is there any molecule with two silanol or siloxane functional groups so that one side bonds with glass or Si substrate and other side bonds with my silica nanoparticles?