What metal thin film houses also do annealing?

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Nagesh Sharma

Lot of sputtering tools are available and temp generally in 200 to 500 deg C, most of the metals do not require annealing..

ULVAC ENTRONTM-W300/W200 only for metal thin film deposition

Steven Nagle

Agreed they do not require annealing, however I want to force some nanoparticle formation. Literature suggests that the best way to control particle size and distribution uniformity is to first lay down a contiguous coating, then anneal it to form the particles.