I had a Galfenol (Fe:Ga, 81:19 %at.) target made for sputtering, when I received the target I sent it for an EDX analysis and the results came back as Fe:Ga:C (60:11:29 %at)
I am curious about other people's experience with this type of target (or perhaps Fe), is this what one would typically see for the EDX and the C content ignored as a surface contaminant?And is a long pre-sputter time just used to ensure clearing of the C? And I am aware that the EDX itself can be the source of C in the readings.
Or do I have a questionable target?
The follow up would be the films, to ensure that they do not end up being a ternary FeGaC alloy.
Hi David,
I think the EDX measurement was wrong. First of all any surface contamined with MLs of carbon, but 29% is too much. To say more I need know the regime of analysis, but the most probable case is an incorrect calculation, when a very thin layer was analyzed (low energy e-beam), and (or) incorrect coefficients (model) was used for recolculation. It is easy to revise under a high energy e-beam (20-30keV).
I second a suggestion to analyze at two different kVs, to check if C is a surface contamination. Then - analysis of a target. It is not unreasonable to see 29% at as a contamination, but your SEM should be quite dirty.
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science
- Materials
- Inorganic Materials
- Metals
- Alloys