We have a XENOS EBL system attached to FESEM JSM-7200F

After the pattern is written on PMMA we coat it with the Gold and do the lift off. Initially I ultra-sonicated the substrate in acetone just for less than 2 seconds but the lift off was not proper which means there are few gold patches remaining along the pattern.

What is the standard lift off method for a clean pattern?

What are the considerations for the same.

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