There is of course an effect on the sticking coefficient (https://www.sciencedirect.com/science/article/abs/pii/S0039602805007259?via%3Dihub), but the main things you want to control with the temperature are the growth mode (2D vs. 3D, poly/fibertexture/epitaxial) and the crystal phase.

A further consideration with such high substrate temperatures could be stress within the film, which in some cases could cause the film to peel away from the substrate. Sputter gas pressure adjustment can help reduce film stress.