There are many methods to calculated the thickness of the film.
1- Please read the manual of your instrument it may be has a thickness monitor and shutter to calculate and control the wanted thickness automatically at once if this is not available you can use one of the next methods manually using one of the following according to condition of the film.
Film thickness can be checked by
1- An interferometric method, more details is available at: TOLANSKY S. Multiple beam interferometry of surfaces and films. London: Oxford University Press, 1988: 147.
2- Using mass of the film, m according to the next details::
W1 is the weight of cleaned substrate
W2 is the weight of cleaned substrate plus film
W2-W1= the weight of the film
ΔW=mg
m = ΔW/g
m=ρXV ; ρ, is the density of film material and V is the volume of the film
the Volume = (Width X Length X Thickness) of the film