Research is still continuing and devices are being developed with manydifferent materials intergrated with MEMS based technologies.

In a typical internal combustion engine, at the time of injection (compression stroke)you need to detect/measure pressures upto nearly 2MPa at around 600 deg C., where as at the peak combustion processes it is required to detect upto 6-7 Mpa at very high temperatures o 1000 deg C.

Besides using the right kind of sensitive and stable materials in MEMS based design, suitable packaging and effective mounting of the sensing devices is a major challenge.

K. Sreenivas

Thank you very much sir!

Applications at 175-200°C are already considered as being "high temperature" in several field of applications (industry, oilfield measurements, aerospace, etc....)

We have in the past developed silicon based  piezoresistive pressure sensors up to several 100's bar, using standard backside micromachining and wafer sealing.

Thank you vincent sir,

I am thinking of SOI piezoresistive pressure sensor, it would be very helpful if you say few things about it.

Thank you.