Survey of literature is rarely used. but ROL and LR are commonly used and no difference between them. Further, the Systematic review and Meta analysis are something more complex.

I do not find any specific difference between the various terms listed in your query. To me they would generally mean the same thing, only differing in the way different words are placed. Having said that, I should clarify a small difference that a survey is just listing without necessarily requiring critical comments  while a review would involve some degree of assessment of the claims etc made in different publications that are being included in the review. A review is a little more than a listing.

Thank you sir.

In perspective to writing a thesis a chapter is dedicated to previous and related literature. So which one should be followed, review or survey for that chapter?

This should ideally be a review so that one can bring out the gaps/unanswered questions to precisely define the objectives of the study. Many institutions, however, want to name this as Literarure Survey,However,  in my opinion,instead of being a simple listing,it should be more critical

Survey of literature is rarely used. but ROL and LR are commonly used and no difference between them. Further, the Systematic review and Meta analysis are something more complex.

What is the difference among Literature Review, Review of Literature, Literature Survey, Survey of Literature etc.?

Literature Review & Review of Literature are referring to the same thing i.e. study on previous body of knowledge pertaining to a researcher's research topic.  Both Literature Survey & Survey of Literature refer to the same thing in which they try to quantify the no. of study precedents after performing the literature review - for an example, Theory A is in opposition to Theory B whereby there might be numerous studies supporting Theory A and there are some studies supporting Theory B.  The researcher tries to survey / quantify the no. of studies in each theories so that s/he can make relevant comments e.g. no. of studies supporting each Theory A & B are around 50% vs 50% whereby further research need to be conducted (this can be a research problem to motivate his or her current study).  Another example can be - many Structural Equation Modeling (SEM) studies had been conducted on Theory X whereby the researchers would like to dig deeper to find out among the many SEM studies, how many are using PLS-SEM and how many are using Covariance-SEM etc.

1 more note to make - both Literature Survey / Survey of Literature should be different from "literature review on survey methodology / design".  Literature review on methodology / survey design can be part of typical literature review to find out specifically what kind of survey design had been used in previous studies e.g. 5-pt or 7-pt Likert scale, bipolar differential scale etc. before the researcher to adopt which is the method s/he intend to deploy in his or her current study.

My favourite reference concerning these matters is Chris Hart (2008). Doing a Literature review. London: Sage. He uses the words literature review, which I prefer to the other options. Your find a pdf on http://www.sjsu.edu/people/marco.meniketti/courses/ARM/s0/Literature-review-Hart.pdf.

Reading the first chapters clarifies the notion and the purpose of a literature review.