It would be nice if you could post the image. Then we can judge about which dimension you are "complaining" , and which signal you were using :-) ?
Do you see this thin layer in both secondary and backscatter electron detectors?
Since it is a glass substrate you are taking about, I would suppose what you see ist a charging effect at the Interface. I also have already observe such darker zones below the coating in a glass substrates.
good point... I always assumed SE-imaging using ions :-(. Hayk, did you used the electron beam for the imaging or the ion beam (collecting the generated SE signal)?
I also think it is a charging phenomenon. I have observed a similar thing in a thin-film silicon solar cell. See the attached image. On the left with SE detector you clearly see a darker region in the glass below the TCO. With the BSE detector is is not visible. It is also not an effect of the FIB polishing, because I also see it in cleaved samples without any FIB polishing.
So now it is clear the reason of this phenomenon.
Thank you everyone for your kind reply and explanation.
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