The fore pressure is within the right range but the ion gauge pressure is around ten time higher than the right range when the ion transfer line is open, even though the turbo pump is running at its full speed with twice the power as normal, close to the maximum power and the temperature is approaching the upper limit too. When the ion transfer line is blocked, the fore pump pressure is within the right range and the ion gauge pressure is close to the normal range as well, with turbo pump running only at low power. The fore pumps are able to reach a few minitorr by stand alone vacuum gauge. Thank you very much

More Zhenfa Zhang's questions See All
Similar questions and discussions