Expansion of SU in SU-8 Photoresist?
Hi Guru,
Structured by Uv...first negative photoresist that can produce very high aspect ratio Structures.
.. and Furthermore compared to simple thin resist , the SU8 once STRUCTURED by near UV can be kept definitely as a permanant structure... for instance in bio MEMS or MiCro Fluidic.
I'd like to share an interesting forum having nearly 100 questions on SU-8:
http://www.sporian.com/cgi-bin/HyperNews/get/SU-8.html
In addition to UV lithography, I have also seen structuring of SU-8 2002 by electron beam lithography.
Structured by Uv
SU-8 is a commonly used epoxy-based negative photoresist.
SU-8 Photoresist
By: Frederik Ceyssens and Robert Puers
SU-8
https://kayakuam.com/products/su-8-photoresists/
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