Hi Maniteja.

if your film transparent is transparent you may use the photo-elastic effect.

Illuminate your sample by polarized light and look at your sample via an analyzer, whose polarization direction is perpendicular to that the primary light. So you will see at least that there is stress in your film and the stress may be nonhomogenous.

When using a Babinet-Soleil-compensator in the optical path you are be able to mesasure the stress birefringence quantitatively. If the photo-elastic coefficient of your material  is known you will then have access to the magnitude of the stress. Please have a look at the second link.

XRD techniques will no really work here because your film is amorphous. Any diffraction peak will here be so very broad that you will not see the peak shift caused by the stress induced strain.  

https://en.wikipedia.org/wiki/Babinet%E2%80%93Soleil_compensator

https://en.wikipedia.org/wiki/Photoelasticity

In photoelastic stress analysis, a reflective coating is applied to the surface of the object under investigation, and a tool such as a digital polariscope splits coherent, monochromatic light into two beams and shines them on the object through a system of polarizers. The resulting interference fringe patterns change when stress is applied to the object.

http://www.webexhibits.org/causesofcolor/16AA.html

Hi Maniteja,

just to clarify:

in your case your film itself is the photo-elastic coating, which Mustafa suggests.

As I understood you want to detect the internal stress in your film but not the response of your sample onto external stresses.

@ Martens

Yes I want to measure the internal stress after depositing the films with differernt recipes. By using curvature method and stony's formula i can measure, but i am searching for other methods. In literature i found photoluminescence method.