We are aiming to measure the profile (depth, roughness and aspect ratio) of in-house fabricated micro channels.
our range of sizes are sub-200 micron and AFM, SEM methods are extremely expensive equipment both operating or buying them.
What are the alternative apparatus that could solve this problem
Hi,
Since your features are sub-200 micron, you may not require AFM or SEM to measure the profile. In this case, I would recommend you to go for an optical profilometer (Leica) or laser confocal microscopy (Olympus). These instruments will help you to measure the profile with an error of less than 1%. Also these equipments are relatively cheaper in comparison with AFM and SEM. If I would comment on the cost of these machines, it would be less than 25% of the cost of a typical AFM or SEM.
Best,
Jose
Jose Joseph thanks for your details. What are the resolution of these equipment?
Can we hope to get 1 micro resolutio?
Thanks,
Yes,
If you use a laser based confocal microscope, you will get a resolution of 1 micron or less. I had used Olympus laser microscope to measure features less than 10 micron with reasonable accuracy. Similarly, optical profilers are also meant to be used in similar applications.
If you are going to purchase any of these, you can get your sample measured by the instrument supplier and the same can be correlated with AFM or SEM data. If your data are matching, then you can purchase.
Best,
Jose
- Badges
- Science method
- Similar topics
- Mathematics
- Statistics
- Statistical Techniques
- Structural Equation Modeling