Hello All,
This may be a very straightforward question, but I am new to this field and things might not be obvious to me.
But I am looking to use a piranha solution to remove SU-8 after is has been fully cross-linked. But before the removal, I want to deposit copper, therefore I am wondering what affect the piranha solution would have on the copper?
At this point I expect to use a 3:1 v/v H2SO4/H2O2 solution. But if you can suggest an ideal ratio for the removal of SU-8 that would also be appreciated!
A few common sulphuric acid based etchants for copper are: concentrated sulphuric acid, aerated or oxygenated diluted sulphuric acid (5─10% w/w), mixture (~1:2 vol/vol) of chromic acid with sulphuric acid (both 5─10 % w/w), solution (~1:2 vol/vol) of hydrogen peroxide (~20 w/v) in sulphuric acid (~ 8─15 % w/w). Etching by these solutions can be enhanced if prepared with aerated or oxygenated water, or by adding ferric chloride to promote pitting. The 'piranha' solution would certainly etch copper. About the 'SU-8' resist: please check the technical data sheet that may apply to the specific product used.
- Badges
- Science topic
- Similar topics
- Physical Sciences
- Materials Science
- Materials
- Inorganic Materials
- Metals
- Alloys