Water vapor plasma bonding of PDMS

Vasilis Theofylaktopoulos @Vasilis-Theofylaktopoulos

01 January 1970 0 4K Report

Hi, could you please share any experience or relevant literature, regarding PDMS to glass or PDMS to PDMS plasma bonding using water vapor?

I have read there are benefits to using water vapor but I don't have a clear picture. In the past I have used either atmospheric air or oxygen.

What are the effects of water vapor in:

-Bonding strength

-Activation time

What are the optimal parameters?

I found this relevant paper for PMMA: Article Water-Vapor Plasma-Based Surface Activation for Trichlorosil...

Looking forward to hearing your thoughts.

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