The source material is a ceramic glaze pattern,After cleaning and drying at 500 degrees for 8 hours.
They are fed into a TiN PVD furnace, the target is 20 plasma sources!
The plating furnace in the process of coarse suction is heated to 120 degrees, rotating the target material evenly 2 rpm
When the vacuum reaches 1.2x10-2 Pa, start coating:
1. First, pure Agron gas is introduced, flow 800-1000sccm, time 4 minutes, plating chamber pressure 6.0x10 + 0 Pa, Turn on 20 TiN plasma sources.rotating the target material evenly 2 rpm
2. Then turn off Agron gas, fill up with high purity Nitor gas, Flow 1100-1200sccm, maintain pressure 2.5x10-1, rotating the target material evenly 2 rpm,Turn on 20 Tin Plasma sources, coating time is 10 minutes. Vacuum chamber temperature is 145 degrees. Finish coating process.
The phenomenon of ceramic surface spots and coatings do not adhere to some textures! We have tried many times and tried to clean the surface, but still can't fix it
But if we dry the vacuum chamber at 70-80 degrees and finish the plating process at 125 degrees, that phenomenon does not happen but the pale color is not satisfactory!This is a system that uses an oil diffuser pump.
Attached picture is surface defect.