PVD system, when opening the oil diffusion pump, the measured value of the ion sensor fluctuates greatly at 9.0-1pa and 7.0-1pa, the system does not leak. cooling water 30 degrees. I was very tired. Maybe the coolant is bad, or the holding pump is causing it. it's hard to understand.
Konstantin Pavlov
Hi Raymon Ics.
What pressure will the pump produce if it pumps on itself? And second, check, one or two wires in diffusion pump heater may have burned out or not working.
I hope my answer was helpful.
Konsta.
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Fateme Nouri
Is your rate of deposition stable?
Your vacuum is highly related to your rate of deposition. Try to keep your rate constant and your vacuum will be stable
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