09 September 2012 6 9K Report

We recently used the 3 omega method to detect the thermal conductivity of a film with about 100nm thickness on a STO substrate with thickness about 500um. In the detection, we strangely found the calculated substrate temperature enhancement is higher than that of the heater line, leading to a negative film temperature enhancement so a negative thermal conductivity. It is unreasonable in our opinion. We have checked the calcualtion process carefully several times. Can anyone give some suggestions?

More Lunyong Zhang's questions See All
Similar questions and discussions