Dear Jitesh. First, SEM instrument do not know if the sample is mounted normally or cross-sectionally, so need not worry about this as taking cross-sectional image is as easy as normal. Now the only parameter to be addressed is the the edge you wish to take the image of, may require to be gold coated.

Simply gold coat that edge say about 5nm gold layer, and take the image.

I have personally done this at times in case of GaN samples. Hope this clears. Please feel free to discuss if you still have any doubt.

Would you provide a schematic for your perovskite LED including dimensions?

Assuming the system is working on standard sample, try to use higher working distance (which should correlate with wider focal depth) if the features of interest are not in the same focal plane. Selection of beam energy may address the same problem. Charging could be a contributing problem too.

Nuestra experiencia con este tipo de problemas para membranas orgánicas ha sido enfriar/congelar y fracturar la muestra y luego aplicar oro en plasma.

Dear Pandya,

Firstly, you must to make clear cross section and clean its edge to determined the the sharp place for imaging and i do not know what kind of holder you use because there is clamp one which make the sample in cross with electron and then you can check the sample by FESEM long the section, according to my experience i find that wobbling with low voltage can give very sharp image with low charging.

You need to look for a microscope JEOL