Hi,
I would like to know if there are special issues when sputtering PTFE with shared cleanroom infrastructure. Would there be cross contamination, out-gassing during later depositions, etc? I have trouble finding much info in the literature, and generally polymers are kept away from the vacuum systems.
Thanks!
Michael
Sputtering fluoropolymers will give you very persistent fluorocarbon/ fluoride contaminations in your vacuum system. It will be a source of fluorine for a long time! The cleaning would be rather difficult: sand paper.
Nobody publishes about such a mess!
So you have a machine in which you sputter PTFE onto a substrate, PTFE is not the substrate, right? [Both is done by different people.] If the chamber gets somewhat hot in the processes of other people close to the decomposition temperature of PTFE whose usage is not recommended beyond 260°C, you will surely get cross-contamination of the other sputtered layers. It is probably better to exchange and clean the chamber shieldings in between.
Thanks for the answers.
In reply to Jürgen, it would be sputtering PTFE onto another substrate.
From both of your answers, it seems like this would not be reasonable on shared infrastructure since I have no control over the cleaning. It could possibly be done before a planned cleaning, but I don't know how thorough they are, and if it would persist. It looks like I will need another solution.
Well put Andreas, I see why no one publishes this!
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