High-k material parameter files can be added to Sentaurus TCAD, for example, HfO2.par. If you want to find the specific parameters, you need to find literature that applies the relevant material.
Do you have their properties like: band gap, complex refractive index data, dielectric constants, electron affinity, recombination coefficients and other?
If you don't have them, you need to find them from literatures or calculate using DFT. If you have them you can create new material file for using Sentaurus TCAD. As a sample you can use one of the material's .par file, copy it and change its name to your materials name. To add to Sentarurus material libruary you need to use from datexcodes.dat In datexcodes, you will define material name, type and color. Then your new material will be shown in materias list. Then datexcodes file should be in your project folder. So, if you want to create new project using your new material you need copy your new material par file and datexcode to your new project folder. If you have problem with writing datxecodes, you can contact with me.