Poly Stress Release via annealing temperature/time?

Zack Zhang @Zack-Zhang

18 August 2016 0 7K Report

We try to use annealing at 800C (different duration) to release A-Si stress.

Anyone get formula about annealing time with stress drop? Thanks.

Condition:

A-Si with 560C deposit 1um thickness.

Annealing temperature 800C

Our plan is: 1Hour/2H/4H/8H.

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