Zack Zhang

2 Questions 2 Answers 0 Followers

Questions related from Zack Zhang

How can I quickly release poly silicon stress via annealing?

How can I quickly release poly silicon stress via annealing? Poly: 560C as dep P dopped. Anneal: 800C/850C. Thanks

19 August 2016 6,071 2 View

Poly Stress Release via annealing temperature/time?

We try to use annealing at 800C (different duration) to release A-Si stress. Anyone get formula about annealing time with stress drop? Thanks. Condition: A-Si with 560C deposit 1um...

18 August 2016 7,214 0 View