there is no difference b/w hafnium oxide/silicon and bare silicon spectra of photoluminescence spectroscopy. same peak appeared(even position of peak also same) for both. why they are same ?
What excitation wavelength did you use? Since your sample is very thin, you could excite light on your sample at a certain angle to get more absorption from hafnium Oxide.
I am using 212 as a excitation wavelength. Actually i was doing for all thickness i.e; 10nm, 15nm ,20nm, all have same spectra from bare silicon to 20nm.@Xuhua Wang
I think you are just seeing the silicon and the film is too thin. Maybe if you had a confocal PL it might work but currently you are getting a lot of signal form the substrate.