I have followed a protocol to obtain carbon electrodes from my SU8 features (SU8 purchased from MicroChem). I have pattern SU8 on bare Si wafer (SU8 features were 50-75 um in height. I inserted them in a furnace with N2 purging in 600C for 2h dwell time both with and without hard bake step (at 200C for 2h). In both cases, the SU8 features were peeled off from Si. I tried same procedure but with 1000C instead of 600C for pyrolysis, and SU8 still peaked off.

Has anyone similar experience with this?

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