Hello all,
I have to do RF sputtering for MoO3 for my LED project. But I have come across many recipes for reactive RF sputtering of MoO3 ,using Mo as a target and Oxygen as the reactive gas But I want to RF sputter MoO3 directly (not via Mo target and then react it with Oxygen). Can anyone suggest me a good recipe for that?
Thank you being helpful with my other questions.