HI all,
I grew some Cu on Si but why it is so ugly like this? I tried to use acetone&IPA&HF to clean it. But they dont work.
1) What is your growth method?
2) Did you preclean the Si wafer?
3) Is there an adhesion layer on the Si?
These three and other smaller things are important for a meaningful answer.
Jürgen Weippert
Hi, the grow method is thermal evaporating. I cleaned Si with Acetone&IPA&DI water and HF. I didn't have any adhesion layer as I transferred the wafer to evaporator chamber immediately after HF cleaning. The adhesion was very good before. But recently the samples will be like in the picture for unknown reasons.
OK, that sounds like the sample should be prepared suitably. Did you recently make any changes to the evaporation source like using a different crucible, a new heating wire or anything?
Do you have access to XPS, AES or EDX so you could check your Cu for impurities?
Jürgen Weippert
I didn't change anything. But maybe check the impurities sounds like a good idea. Thank you!
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