Hi Gumaa,

well...not exactly a software, but the python package LMFIT might provide what you are looking for. It comes with a lot of pre-built models but allows you also to build and use your own models. It's fairly easy to work with and well documented. If you can afford to spend some time getting used to it (and learning a bit of Python), it might be worth checking out:

https://lmfit.github.io/lmfit-py/intro.html

Normally Voigt approximation functions are satisfactory for fitting photoelectron peaks, only modification with an exponential tail is required for metallic peaks and graphitic sp2 carbon. So I'm not sure what you mean by "split peak function merged".

For atomic concentrations you can use MATLAB/Origin etc. to fit and remove and background and extract the peak areas. Then you need to divide by a relative sensitivity factor. You can calculate these manually and get an approximate RSF by multiplying the cross section (tabulated) by the inelastic mean free path.

This is doable for a small set of spectra, or a large set of repeated spectra, but if you are measuring a lot of elements, I'd recommend a software purchase eg CASAXPS.com etc.

Dar Gumaa, you may want to try Fityk (https://fityk.nieto.pl/)

Good luck, Dirk

Dirk Luetzenkirchen-Hecht thanks for the suggestions I m using it and it. it has also some splitoesdo functions which are combination of two different shapes. I tried to buikd a new function in it however it was super difficult and I couldn’t do it

Jonathan Schneider thanks Jonny, i totally agree with you. I was planning to learn Python from you and Tim before leaving the group however I didnt find the time. I have a plan to spent some time to learn python and I already registered in on of python workshop for beginners might that help

Ben F. Spencer thanks. I am also using CASA XPS software and I didn’t find any problem in Fitting s, p or d of any element since all of them can be fit either with Gaussian, Voigt or LA or even split function of these shapes. my issue is I am trying to fit Copper auger region and I wanna to fit it with a single peak which in some times is a combination of several peaks.

Gumaa Ali M. EL-Nagar Ah OK, well for Auger peaks, which can't really be used for quantification, our approach is to fit as many simple peaks as possible, in order to determine more accurate peak positions. However, often just using the most intense data point is sufficient.

Ben F. Spencer agree! however Cu2p cant differentiate between metallic and Cu+1 species that is why we need the Cu auger peaks. we could fit the Cu auger with six different peaks based on the literature how it is not possible to use them for quantification that is why fitting copper auger region with three peaks for different copper species with similar shape of the measured auger spectrum is the best for such quantification