Dear Rudolf,

"Fundamentals of Microfabrication and Nanotechnology" Volume I, II and III by "Marc J.Madou" by CRC Press, is one of the best book of Photolithography.

The books explains the multidisciplinary domains of lithography process and micro/nanofabrication.

Best regards,

Varun P Sharma

Just search with keywords on the google scholar website. You will find many. Alternatively, you can do the same thing using the researchgate search option.

-"Polymer microfabrication technologies for microfluidic systems"

Holger Becker & Claudia Gärtner

-"Miniaturized tools and devices for bioanalytical applications:

an overview"

Michal Chudy & Ilona Grabowska & Patrycja Ciosek & Alicja Filipowicz-Szymanska &Dorota Stadnik & Iwona Wyzkiewicz & Elzbieta Jedrych & Marcin Juchniewicz &

Maciej Skolimowski & Karina Ziolkowska & Radoslaw Kwapiszewski

Ru El You can refer the book "Fundamentals of micro-fabrication and nanotechnology" ---Volume II by Marc J. Madou

Dear Rudolf, as the others mentioned the book: "Fundamentals of micro-fabrication and nanotechnology" ---Volume II by Marc J. Madou is a good one.

This book has a wide range of information including materials, processes, and manufacturing options. Also good examples of microfabrication includes recent developments in design packages, DNA and protein array, and fluidics.

I also usually use the book "Introduction to Microfabrication" by Sami Franssila as my reference whenever I want to look through the details. The latter has good examples for process flow. There are many other helpful books in this topic that I list them here:

•R. F. Wolffenbuttel, „Silicon sensors and circuits: on-chip compatibility", Chapman & Hall

•L. Ristic, "Sensor Technology and Devices", ArtechHouse, Boston London

•S. M. Sze, "Semiconductor Sensors", John Wiley & Sons

•G. T.A. Kovacs, „Micromachined Transducers Sourcebook“, Mac Graw Hill

•T. M.Adams, R. A. Layton, „Introductory MEMs-Fabrication and Application“, Springer

•M. Elvenspoek, H. Jansen, „Silicon Micromachining“, Cambridge University Press

•Mohamed Gad-el-Hak ed., „The MEMS Handbook“, CRC Press

•M. Madou, "Fundamentals of Microfabrication“, CRC Press

•S. M. Sze, "Physics of Semiconductor Devices", John Wiley & Sons

•S. M. Sze, "VLSI Technology", Mac Graw Hill

For recent advances I suggest you read review papers.

https://youtube.com/c/ChrisMack

Anyday.