Kapton is a very good choice, there is more than one kind of Kapton with different temperatures stability and different thicknesses, you can also take in consideration Upilex from UBE company, also a very stable polyimide.
... in fact pure (yellow - brownish) Kapton is a good isolating substrate, but if you need electrical conductivity, you may also get black Kapton, to which some graphite is added to ensure electrical conductivity. Silcone rubbers such as PDMS (Polydimethylsiloxane) may also be interesting for you, provided e.g. by Dow Corning.
But there are probably much more materials available.
Dear Ghayeb,
I have been using Upilex® for my photovoltaic devices. It is processable up to 400 C. I am able yo fabricate very high-quality thin films on these substrates by magnetron sputtering technique. Moreover, recently I have deposited thin films on Upilex foils by spray pyrolysis technique and the article is in press. I will publish it here in near future. This means Upilex foil is very suitable for different deposition techniques both for vacuum and non-vacuum techniques. If you like to see more detail your recent results, you can investigate the following articles.
All the best.
Conference Paper Effects of Dual RF Plasma Treatment on Polyimide Films Used ...
Conference Paper Effects of microwave and RF plasma treatment on the surface ...
Poster Atmospheric Air Plasma Modification and Thin Film Deposition...
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