Less than 450 C probably.
I have seen LT ALD Al and Cu but not Ti, Ta and W. Maybe plasma is working for those three metals.
There should be some W (Tungsten) ALD processes below 450 ºC. Here's a link to one of W ALD paper at 300 ºC: http://goo.gl/Z9Jc1G
Would a nitrogen or inert ambient or even vacuum suffice?
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Bunched toward the edge or more spread out?
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