Less than 450 C probably.
I have seen LT ALD Al and Cu but not Ti, Ta and W. Maybe plasma is working for those three metals.
There should be some W (Tungsten) ALD processes below 450 ºC. Here's a link to one of W ALD paper at 300 ºC: http://goo.gl/Z9Jc1G
Would a nitrogen or inert ambient or even vacuum suffice?
31 December 2012 3,480 0 View
Bunched toward the edge or more spread out?
31 December 2012 6,901 5 View
Approximate concentrations are require in compared with the WHO permissible limts
11 August 2024 2,723 1 View
A crude extract of fungal culture using EtOH was subjected to column and TLC and partially purified compound was obtained. UV vis spectrum of the compound/s has max absorbance at 218nm. The...
11 August 2024 9,801 2 View
For example, I perform passivation process before electropolymerization of Py for adhesion to titanium surface. Is a similar or different procedure required for ITO? If necessary, I would be glad...
06 August 2024 3,176 0 View
Reference dose and Maximum acceptable concentrations HMs
03 August 2024 8,230 4 View
Why is TLC not a form of partition chromatography and paper chromatography not a form of absorption chromatography?
03 August 2024 7,035 3 View
What types of mask designs for metal deposition, to be used in a PVD system, are best suited for perovskite-based solar cells?
31 July 2024 4,835 3 View
I need something like Camag's VisionCat software for photodocumentation of TLCs. Could you recommend something?
31 July 2024 8,415 1 View
I am looking to purchase a photography kit for onsite metallurgical investigations, such as capturing photos of worn areas, hot tears, cold tears etc. Could anyone suggest me a good...
22 July 2024 3,490 2 View
>>>>>>>>>> Convergence criterion not met. SCF Done: E(RB3LYP) = -472.437545326 A.U. after 33 cycles NFock= 32 Conv=0.29D-07 -V/T= 2.2914...
16 July 2024 8,862 2 View
im studing gaussian 16 with reading paper about I-131 Metaiodobenzylguanidine in the paper "In a similar vein, nuclear magnetic resonance shielding values were investigated using the widely...
16 July 2024 6,040 4 View
