Frederick T Chen | Industrial Technology Research Institute

Frederick T Chen

3 Questions 13 Answers 0 Followers

Questions related from Frederick T Chen

Is there any low-temperature ALD process for interconnect metals (Ti, Ta, W, Al, Cu)?

Less than 450 C probably.

01 January 2013 8,310 2 View

In the Hall Effect, moving charges are displaced transversely, but how do they finally end up distributed?

Bunched toward the edge or more spread out?

01 January 2013 6,948 5 View

Will only an oxygen ambient high-temperature anneal remove oxygen vacancies in gate dielectrics?

Would a nitrogen or inert ambient or even vacuum suffice?

01 January 2013 3,522 0 View