The desired thickness is ~1.5um. i-line resist.
You have to give more information as to what you want to do with it and what properties you want the resist to have. If you want it only for lithography then please tell if you want a positive or a negative tone photoresist.
Ideally, for lithograohy, I will need to use both for the different processes I will be using.
I think SU8 works well with gold...
We have tried SU-8 spicoating onto some other metals and they worked out well..but not on Gold..I also guess that it should work fine..
See the below article which talks about adhesion strength between SU-8 and gold:
http://www.sciencedirect.com/science/article/pii/S0167931704005556
Looks like some prior works are there on this topic. You may wish to do a thorough literature survey on this topic. Good luck.
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