I want to measure the contact resistance of metal oxides thin films deposited on top of n-type silicon wafers. Can I use the Transfer length method for measuring the same?
Santosh M. Bobade
You can. Is your metal oxide film is semiconducting? you just have deposit metallic contact on you film in a pair with different separation. Analyze the data. you will get contact resistance and resistance of your metal oxide film .
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Juhi Kumari
Thank you so much sir for your suggestion.
Yes, I want to do this for metal oxides film which are semiconducting in nature.
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Juhi Kumari
Thank you Mr. Thomas for sharing this information.
Can we also estimate sheet resistance of our semiconducting film using this?
In literature many people are using it for measuring sheet resistance also.
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