Is the SiO2 thin film deposited on Si wafer negatively charged? or positively charged?

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Daniel Wijnperle

In contrast to thermally grown SiO2, which is positively charged, the plasma enhanced deposition of SiO2 might result in a negative charge. This can be caused due to oxidation of the silicon surface by the plasma. But: To measure is to know.

Salmeen Shakil Choudhury

Thank you for your answer :)