I want to do finishing of sphere attached to a bar at the end. the dia of sphere is 6mm and the bar is 4mm. So, the best possibility for finishing of sphere without losing its sphericity.
Depending on the degree of end finish desired, I would wonder whether this would be better done by polishing a sphere by itself and then attaching it to a rod.
In any case, mechanical polishing would likely cause distortions because it would be done in non-symmetric conditions. This may be possible with an electrochemical process as one alternative.
I did try many different techniques, including CMP, buffing, electro-chemical. It all depends on the materials you use; metals, plastics are all behave different. In my experience, I found that mechanical buffing with right abrasive pastes gives the best results where on copper and stainless steel I could get down to 10-15nm, PTFE was somewhat rougher due to its high compliance. In general you an achieve better surface finish with harder materials by mechanical polishing. I periodically used optical profilometer to check the local radius of curvature and the resultant surface roughness.
You can get more details in some of my papers about the procedure.