Inertial Confinment of Tin Plasma for EUV Lithography?

28 August 2023 1 5K Report

Would it be possible to use inertial confinement as used in nuclear fusion for the containment of tin plasma for the production of EUV light for semiconductor lithography?

Johannes Gruenwald

Hi Christian,

interesting question - which wavelength would you need for that 13.5 nm, or even shorter?

I am pretty sure that you can do that but I think there are much better plasmas than tin - feel free to drop me a PM, if you want to discuss.

cheers

Johannes

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