Generally speaking, by setting up different rate windows in subsequent DLTS spectra measurements one obtains different temperatures at which some particular peak appears. However, when I change the rate window, the shape and size of the spectra varies obviously. The attachment A and B shows the DLTS spectra of device 1 and 2 in the rate window of 100 s-1 and 20 s-1, respectively. When the rate window is 100 s -1, the peak amplitude of device 2 is larger than the one of device 1, nevertheless, the situation goes to the opposite direction when the rate window is 20 s-1. I was wondering that the concentration of corresponding defect of device 2 is higher of lower than device 1?