I want to know the wafer mapping using Statistical Process Controll(SPC)

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Ghulam Sarwar Shaikh

follow the links

Statistics in Advanced Manufacturing - ISyE

www2.isye.gatech.edu/~jshi33/Publications/JournalPapers/p34.pdf

www.silvaco.com/tech_lib_TCAD/simulationstandard/1997/.../a8.html

www.camline.com/en/products/lineworks/quality.../lineworks-sdc.htm

Laurentiu - Aurel Mihail

It may be done, but you have to open several SPC, simultaneously, for each monitored point .

Tito Armando Rossi Filho

One potential application of SPC would be to consider the response variable as the yield for each region of the wafer. It may point out special causes of processes in the wafer fab.

Suggestion of reference: http://smithsonianchips.si.edu/ice/cd/CEICM/SECTION3.pdf