How to wet etch Al2O3 selective to HfO2?

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Qiang Wei

You can try NaOH 10%

Al₂O₃ + 2NaOH = 2 NaAlO₂ + H₂OAl₂O₃ + 2OH- = 2AlO₂- + H₂O

Adam Weidling

Megan O. Hill

Hey Megan,

Here is a link to some recipes. I used to do a very similar process. I've found hafnia quite robust to various wet etchants.

https://wiki.nanotech.ucsb.edu/wiki/Wet_Etching_Recipes

Best of luck.

-Adam