Megan O. Hill

2 Questions 1 Answers 0 Followers

Questions related from Megan O. Hill

Any ideas on how to wet etch Al2O3 selective to PMMA?

I have ~150nm PMMA coating Al2O3 (50nm) which I would like to etch ebeam fabricated patterns out of the Al2O3. For UV litho patterns I use AZ 4533 and etch the Al2O3 with 80% H3PO4 at 110C....

26 November 2021 3,070 3 View

How to wet etch Al2O3 selective to HfO2?

I have ~50 nm Al2O3 (ALD), and want to etch but not effect the underlayer of HfO2. Any suggestions? Also want to wet etch, not physical. Thanks!

28 September 2021 1,850 2 View