How to solve the problem that the film obtained by magnetron sputtering on the ternary alloy target A2BC is ABC (not A2BC)?

Using magnetron sputtering with an alloy target composed of A:B:C in a 2:1:1 ratio, the resulting thin film composition is A:B:C=1:1:1. How can you achieve a A:B:C=2:1:1 composition? What are some...

25 June 2024 1,448 0 View