How to solve scattering problem in sidewall of any pattern devices by using maxwell formulation without simulations through FDTD and COMSOL?

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fatal error

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Mohammad Soroosh

Using a particle view, you can use the Monte Carlo method to solve scattering issues. In this method, different scattering rates has been presented. Please see the following link:

https://www.amazon.com/Numerical-Simulation-Submicron-Semiconductor-Materials/dp/0890066205

Nagendra Yadav

Thanks for your kind reply but it is Numerical Based. I have read one paper has based on Monte Carlo which is numerical based. I am looking New theoretical model which should be based on Maxwell based on this can calculate scattering field and then apply with stokes.