Silvaco has some examples on GaN based HEMTs. I would refer you to a paper from our group on simulation of capacitance characteristics for a dual field plate GaN HEMT.
Analysis and Modeling of Cross-Coupling and Substrate Capacitances in GaN HEMTs for Power-Electronic Applications,” IEEE Transactions on Electron Devices, vol. 64, no. 3, pp. 816-823, Mar. 2017.
Karmalkar and Mishra "Enhancement of Breakdown Voltage in AlGaN/GaN High Electron Mobility Transistors Using a Field Plate", ED 48, No. 8, pp 1515-1521, August 2001.