In order to remove PDMS from SU8 molds I have used Trichloro(1H,1H,2H,2H-perfluorooctyl)silane coated on SU8. I have to bond these PDMS replica to PDMS. But, I think residue silane (which came while peeling off PDMS from SU8) is making the PDMS-PDMS bonding difficult. Is there a way to wash away this residue silane on PDMS?
It will be removed during your 02 plasma step performed before your PDMS-PDMS bounding step.
I hope it will help you
Good luck
Take the PDMS fluid containing silane (such as trialkoxy or di alkoxy silanes.). Heat the fluid and add water containing Acetic acid (0.1%) and allow it to react for some time at 90 to 110 C. Silane will cross link with itself and precipitate out. Filter and remove silane. PDMS will not be affected by water/Acetic acid treatment and excess could be removed by application of heat and vacuum.
see p 19 in http://www.gelest.com/themencode-pdf-viewer/?file=http://www.gelest.com/wp-content/uploads/Microfluidics-no-price-6-2016.pdf
I also have this question, do you have a proven track record of success?
Thx~
You need to take sample in the lab and try it out. Each system will differ based on what type of silane and the PDMS you have Trick is to cross link silane but not the PDMS. This would mean that PDMS must be fully capped and we must use only weak acid or base to initiate silane cross-linking. Once Silane cross inks it will precipitate and could be filtered out. Please try it out in lab and ensure process effectiveness.
Ravi Kulkarni
Hi Ravi,
I used Trichloro(1H,1H,2H,2H-perfluorooctyl)silane to release AgPDMS(85%wt) from SU8 mold , but it made the AgPDMS-glass bonding difficult. And in your answer, you heat the fluid and add water containing Acetic acid (0.1%) and allowed it to react for some time at 90 to 110 C. And I want to know the more specific operations and time. Do you have any suggestions?
Thanks in advance.
-Zhang
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