Hello everyone, I am measuring the residual environment of an indigenously developed 2.45 GHz operated Electron Cyclotron Resonance (ECR) Plasma Enhanced Chemical Vapour Deposition (PECVD) system by a QRGA system (1-200 amu). The PECVD system is currently kept at a vacuum 3x10-3 mbar (using anti-suckback double stage rotary vane pump). QMS study has been carried out at both unbaked (~300K) condition and higher temperature (~700K).
It has been observed that at higher temperature, the residual environment of the PECVD system contains very high amount of hydrogen may be contributed by degassing from inner wall of the chamber and rotary pump's oil vapour.
I am thinking of removing the hydrogen content present in the PECVD system at higher temperature. Without improving the base vacuum, what are the possible ways this hydrogen content can be minimized? We know Palladium has the ability to absorb large volumetric quantities of hydrogen at room temperature and atmospheric pressure, and subsequently forms palladium hydride (PdHx). Are there any other materials that can be used at higher temperature (~700K to 800K) for this residual hydrogen absorption?
Selective removal of hydrogen on fine vacuum level is a tricky task. Maybe you can ask the supplier of these:
https://www.saesgetters.com/products-functions/products/getters/hydrogen-getters/suisorb
if they are applicable for you.
Thank you Dr. Jürgen Weippert for the information. However, can hydrogen content be significantly reduced if I improve the vacuum condition of the PECVD system to 10-5 or 10-6 mbar range utilizing a diffusion pump/TMP?
I used a palladium window with a heater (600-700 deg C) for this purpose.
External volume can be oxygen or air that will eat the hydrogen from the other side.
Samit Karmakar Hydrogen is one of the most common residual gases beside CO, H2O and CO2. If you reduce the base pressure, these will make up the bulk of your reductions.
Thank you Dr. Konstantin E. German for your reply. Can you please share your publication or any other link in this regard. It will be a great help.
Okay Dr. Jürgen Weippert. You are right. Hence I was thinking of other materials for this purpose.
Dear Samit Karmakar,
THat was a part of the installation/device used in my very old work
Article Mechanism of the reaction between atomic tritium and the fun...
The palladium window was used for dossage of tritium to the experimental volume by heating when T2 was to add.
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