Let's suppose I have an STO substrate and I have deposited a thin film of another material and it is highly oriented and STO as well as my material both form are cubic.
To better understand the quality of the thin films I want to perform RSM. Kindly let me know how is RSM performed experimentally. How are asymmetric planes of substrate and thin-film probed in asymmetric RSM?
How are details such as mosaicity, curvature, lattice parameters, strain and dislocations obtained from the experimental data?